EFFECT OF HIGH ELECTROSTATIC ACTUATION ON THERMOELASTIC DAMPING IN THIN RECTANGULAR MICROPLATE RESONATORS

In this paper, a micro resonator is modeled as a thin rectangular microplate with ther-
moelastic damping that is actuated electrostatically. Large static deformation due to high
polarization voltage is considered, and vibration of microplate occurs around the static de-
flection. Due to the effect of thermoelastic damping, the frequency of vibration is a complex
value that is used to determine the quality factor of thermoelastic damping. Also, the pull-in
voltage is considered because nonlinear properties are more appeared when approaching the
polarization voltage to the pull-in voltage.